Orion 3100S air molecular pollutant monitoring system

Ultra-sensitive, Real-time Measurement of Trace Ammonia , HCl , HF  Gas in Clean Room in Lithography Process

The Deep Ultraviolet (DUV) lithography process has proven to be especially sensitive to many types of molecular level contaminates. Ammonia, and acid gases are known to create problems throughout the fab.

The development of improved DUV Resist materials and long-life filters has not lessened the need for continuous real-time monitors, in fact it has made the measurement of airborne contaminants critically important.

The use of the ORION 3100 based on CEAS  Series Analyzer will improve resist uniformity, guarantee maximum filter life, and reduce process downtime.

ETG HMI (Human Machine Interface) software allows real-time viewing, manipulation, and automation of ammonia, HCl, HF analyzer that are sampling from several different locations. This software program was written for semiconductor facilities attempting to monitor and control airborne contamination in the DUV lithography process. This software has the flexibility to be applied to any industrial setting where multipoint sampling by one or more CEAS analyzers is needed. Features include easy interactive control of alarms, data logging, historical trending, and basic analyzer functions from a Windows environment.

Enhanced Sensitivity

The instrument, based on CEAS technology, is extremely simple to use, inexpensive to operate, and includes all components (internal vacuum pump, keyboard, mouse, video monitor) to start recording data within minutes. Other atmospheric gases, including water vapor, carbon dioxide, oxygen, and methane, do not interfere with the HCl, HF, NH3 measurements. The instrument includes an internal computer that can store data practically indefinitely on its internal hard drive (for unattended long-term operation), and that can send real-time data to a data logger through its analog and digital (RS232 serial) outputs. In addition, an Ethernet connection allows remote access to data files stored on the instrument’s hard drive. ETG HCl Analyzer provides the high quality data necessary for the most demanding trace gas monitoring applications.

Detectivity/Precision (1-σ) is : HCl 0.1 ppb ; HF 0.1 ppb ; NH3 < 0.1 ppb

Fast time of response

The data it's updated every 5 seconds for each channel .

System Plug & Play

The system it's very simple to use and in few minutes he can to operate in clean room. 

Low cost of ownership

The cost of ownership are very limited because the CEAS don't need of special consummables or critical parts  

CEAS – Theory of operation

Schematic diagram of the instrument based on CEAS for high-sensitivity absorption measurements in the near-infrared region. The measurement cell is comprised of a cylindrical tube sealed by a pair of highreflectivity mirrors. The relative laser wavelength is measured by recording the laser transmission through a solid (FSR = 2.00 GHz) etalon. The beamspropagating out of the cell through the left-side cavity mirror have been omitted for clarity.

The EP version incorporates proprietary internal thermal control for ultra-stable measurements  with unsurpassed precision, accuracy and drift.

The CEAS technology has many proven advantages over conventional first-generation cavity ringdown spectroscopy (CRDS) techniques. In brief, since the laser beam does not have to be resonantly coupled to the measurement cell (i.e. precise beam alignment is not critical), ETG Analyzers are relatively inexpensive, simple to build, and inherently robust thermally and mechanically.

Key Features of ORION 3100

· Real-time at sub-ppb measurements

· 
CEAS principle of operations

· Continuous, unattended operation in harsh or hazardous environments

· No reagents, radioactive source, paper tape, absorbent tubes or other expensive consumables required for operation

· Long-term stability and reliability

· Solid-state electronics and no moving parts

· Low maintenance for maximum uptime

· Every monitor is shipped factory-calibrated with an applications performance specification.

· CEAS analyzers for single/multiple trace gas compounds detection

· Multipoint sampling from 4 to 64 channels

· Programmable Alarm and Fault Relays with Individual Programmable Alarm Levels

· Programmable Sample Point Sequencing with Individual Channel Purge and Analysis

· Open Communication Protocol for easy integration to existing systems

· No Data loss during power interruption or shutdown

· Touch-screen display allows Graphic and Operator functions to be changed or updated easily

· Connections ¼ “ OD

· Piping : PFA, PVDF

· Max length pipe line for each channel measured : 80 mt

· Panel PC colour VGA touch screen which allow graphic and operator functions

· Remote visualization and operation by Radmin Software or similar

· Any carrier or special utilities

· Output signal : Standard : RS232 , Ethernet  Optional : 4-20 mA, Modbus

· Electrical supply : 115-230 Vac 50/60 Hz

· Calibration verification by optional Calibration with Permeation generator

· Sampling by Sample & Fast loop pump